Cycle 240:C:\Messungen\Sebastian Benz\20210907_Iod\Temp20210907_SBenz.117.Ta-At-3.1_1.pro:1:8:20210907_SBenz.Ta-At-3.1:O 1s 12
	Characteristic Energy eV	1.486600e+003	Acquisition Time s	6.000000e+000
Name		O 1s	O 1s	
Position		531.94	530.69	
FWHM		2.60	1.55	
Area		710.82	1801.56	
Lineshape		GL(30)	GL(30)	
K.E.	Counts	O 1s	O 1s	Background	Envelope		B.E.	CPS	O 1s	O 1s	Background CPS	Envelope CPS
9.432000e+002	1.200900e+004	1.200900e+004	1.200900e+004	1.200900e+004	1.200900e+004		5.434000e+002	2.001500e+003	2.001500e+003	2.001500e+003	2.001500e+003	2.001500e+003
9.434000e+002	1.170200e+004	1.170200e+004	1.170200e+004	1.170200e+004	1.170200e+004		5.432000e+002	1.950333e+003	1.950333e+003	1.950333e+003	1.950333e+003	1.950333e+003
9.436000e+002	1.177300e+004	1.177300e+004	1.177300e+004	1.177300e+004	1.177300e+004		5.430000e+002	1.962167e+003	1.962167e+003	1.962167e+003	1.962167e+003	1.962167e+003
9.438000e+002	1.189800e+004	1.189800e+004	1.189800e+004	1.189800e+004	1.189800e+004		5.428000e+002	1.983000e+003	1.983000e+003	1.983000e+003	1.983000e+003	1.983000e+003
9.440000e+002	1.196000e+004	1.196000e+004	1.196000e+004	1.196000e+004	1.196000e+004		5.426000e+002	1.993333e+003	1.993333e+003	1.993333e+003	1.993333e+003	1.993333e+003
9.442000e+002	1.180300e+004	1.180300e+004	1.180300e+004	1.180300e+004	1.180300e+004		5.424000e+002	1.967167e+003	1.967167e+003	1.967167e+003	1.967167e+003	1.967167e+003
9.444000e+002	1.186500e+004	1.186500e+004	1.186500e+004	1.186500e+004	1.186500e+004		5.422000e+002	1.977500e+003	1.977500e+003	1.977500e+003	1.977500e+003	1.977500e+003
9.446000e+002	1.197100e+004	1.197100e+004	1.197100e+004	1.197100e+004	1.197100e+004		5.420000e+002	1.995167e+003	1.995167e+003	1.995167e+003	1.995167e+003	1.995167e+003
9.448000e+002	1.185800e+004	1.185800e+004	1.185800e+004	1.185800e+004	1.185800e+004		5.418000e+002	1.976333e+003	1.976333e+003	1.976333e+003	1.976333e+003	1.976333e+003
9.450000e+002	1.190100e+004	1.190100e+004	1.190100e+004	1.190100e+004	1.190100e+004		5.416000e+002	1.983500e+003	1.983500e+003	1.983500e+003	1.983500e+003	1.983500e+003
9.452000e+002	1.191000e+004	1.191000e+004	1.191000e+004	1.191000e+004	1.191000e+004		5.414000e+002	1.985000e+003	1.985000e+003	1.985000e+003	1.985000e+003	1.985000e+003
9.454000e+002	1.188200e+004	1.188200e+004	1.188200e+004	1.188200e+004	1.188200e+004		5.412000e+002	1.980333e+003	1.980333e+003	1.980333e+003	1.980333e+003	1.980333e+003
9.456000e+002	1.191200e+004	1.191200e+004	1.191200e+004	1.191200e+004	1.191200e+004		5.410000e+002	1.985333e+003	1.985333e+003	1.985333e+003	1.985333e+003	1.985333e+003
9.458000e+002	1.184500e+004	1.184500e+004	1.184500e+004	1.184500e+004	1.184500e+004		5.408000e+002	1.974167e+003	1.974167e+003	1.974167e+003	1.974167e+003	1.974167e+003
9.460000e+002	1.194700e+004	1.194700e+004	1.194700e+004	1.194700e+004	1.194700e+004		5.406000e+002	1.991167e+003	1.991167e+003	1.991167e+003	1.991167e+003	1.991167e+003
9.462000e+002	1.171500e+004	1.171500e+004	1.171500e+004	1.171500e+004	1.171500e+004		5.404000e+002	1.952500e+003	1.952500e+003	1.952500e+003	1.952500e+003	1.952500e+003
9.464000e+002	1.219500e+004	1.219500e+004	1.219500e+004	1.219500e+004	1.219500e+004		5.402000e+002	2.032500e+003	2.032500e+003	2.032500e+003	2.032500e+003	2.032500e+003
9.466000e+002	1.177500e+004	1.177500e+004	1.177500e+004	1.177500e+004	1.177500e+004		5.400000e+002	1.962500e+003	1.962500e+003	1.962500e+003	1.962500e+003	1.962500e+003
9.468000e+002	1.194100e+004	1.194100e+004	1.194100e+004	1.194100e+004	1.194100e+004		5.398000e+002	1.990167e+003	1.990167e+003	1.990167e+003	1.990167e+003	1.990167e+003
9.470000e+002	1.187200e+004	1.187200e+004	1.187200e+004	1.187200e+004	1.187200e+004		5.396000e+002	1.978667e+003	1.978667e+003	1.978667e+003	1.978667e+003	1.978667e+003
9.472000e+002	1.181900e+004	1.181900e+004	1.181900e+004	1.181900e+004	1.181900e+004		5.394000e+002	1.969833e+003	1.969833e+003	1.969833e+003	1.969833e+003	1.969833e+003
9.474000e+002	1.174300e+004	1.174300e+004	1.174300e+004	1.174300e+004	1.174300e+004		5.392000e+002	1.957167e+003	1.957167e+003	1.957167e+003	1.957167e+003	1.957167e+003
9.476000e+002	1.188000e+004	1.188000e+004	1.188000e+004	1.188000e+004	1.188000e+004		5.390000e+002	1.980000e+003	1.980000e+003	1.980000e+003	1.980000e+003	1.980000e+003
9.478000e+002	1.175500e+004	1.175500e+004	1.175500e+004	1.175500e+004	1.175500e+004		5.388000e+002	1.959167e+003	1.959167e+003	1.959167e+003	1.959167e+003	1.959167e+003
9.480000e+002	1.177400e+004	1.177400e+004	1.177400e+004	1.177400e+004	1.177400e+004		5.386000e+002	1.962333e+003	1.962334e+003	1.962333e+003	1.962333e+003	1.962334e+003
9.482000e+002	1.177500e+004	1.177500e+004	1.177500e+004	1.177500e+004	1.177500e+004		5.384000e+002	1.962500e+003	1.962501e+003	1.962500e+003	1.962500e+003	1.962501e+003
9.484000e+002	1.176600e+004	1.176601e+004	1.176600e+004	1.176600e+004	1.176601e+004		5.382000e+002	1.961000e+003	1.961001e+003	1.961000e+003	1.961000e+003	1.961001e+003
9.486000e+002	1.196900e+004	1.196901e+004	1.196900e+004	1.196900e+004	1.196901e+004		5.380000e+002	1.994833e+003	1.994835e+003	1.994833e+003	1.994833e+003	1.994835e+003
9.488000e+002	1.181900e+004	1.181903e+004	1.181900e+004	1.181900e+004	1.181903e+004		5.378000e+002	1.969833e+003	1.969838e+003	1.969833e+003	1.969833e+003	1.969838e+003
9.490000e+002	1.182500e+004	1.182505e+004	1.182500e+004	1.182500e+004	1.182505e+004		5.376000e+002	1.970833e+003	1.970842e+003	1.970833e+003	1.970833e+003	1.970842e+003
9.492000e+002	1.200900e+004	1.200910e+004	1.200900e+004	1.200900e+004	1.200910e+004		5.374000e+002	2.001500e+003	2.001516e+003	2.001500e+003	2.001500e+003	2.001516e+003
9.494000e+002	1.185200e+004	1.185218e+004	1.185200e+004	1.185200e+004	1.185218e+004		5.372000e+002	1.975333e+003	1.975363e+003	1.975333e+003	1.975333e+003	1.975363e+003
9.496000e+002	1.188300e+004	1.188333e+004	1.188300e+004	1.188300e+004	1.188333e+004		5.370000e+002	1.980500e+003	1.980555e+003	1.980500e+003	1.980500e+003	1.980555e+003
9.498000e+002	1.183000e+004	1.183059e+004	1.183000e+004	1.183000e+004	1.183059e+004		5.368000e+002	1.971667e+003	1.971765e+003	1.971667e+003	1.971667e+003	1.971765e+003
9.500000e+002	1.181400e+004	1.181505e+004	1.181400e+004	1.181400e+004	1.181505e+004		5.366000e+002	1.969000e+003	1.969175e+003	1.969000e+003	1.969000e+003	1.969175e+003
9.502000e+002	1.181600e+004	1.181782e+004	1.181600e+004	1.181600e+004	1.181782e+004		5.364000e+002	1.969333e+003	1.969636e+003	1.969333e+003	1.969333e+003	1.969636e+003
9.504000e+002	1.199800e+004	1.200109e+004	1.199800e+004	1.199800e+004	1.200109e+004		5.362000e+002	1.999667e+003	2.000182e+003	1.999667e+003	1.999667e+003	2.000182e+003
9.506000e+002	1.199600e+004	1.200116e+004	1.199600e+004	1.199600e+004	1.200116e+004		5.360000e+002	1.999333e+003	2.000193e+003	1.999333e+003	1.999333e+003	2.000193e+003
9.508000e+002	1.188700e+004	1.189545e+004	1.188700e+004	1.188700e+004	1.189545e+004		5.358000e+002	1.981167e+003	1.982575e+003	1.981167e+003	1.981167e+003	1.982575e+003
9.510000e+002	1.180000e+004	1.181356e+004	1.180000e+004	1.180000e+004	1.181356e+004		5.356000e+002	1.966667e+003	1.968927e+003	1.966667e+003	1.966667e+003	1.968927e+003
9.512000e+002	1.181000e+004	1.183135e+004	1.181000e+004	1.181000e+004	1.183135e+004		5.354000e+002	1.968333e+003	1.971891e+003	1.968333e+003	1.968333e+003	1.971891e+003
9.514000e+002	1.190500e+004	1.188050e+004	1.184756e+004	1.184756e+004	1.188050e+004		5.352000e+002	1.984167e+003	1.980083e+003	1.974594e+003	1.974594e+003	1.980083e+003
9.516000e+002	1.182800e+004	1.189734e+004	1.184753e+004	1.184753e+004	1.189734e+004		5.350000e+002	1.971333e+003	1.982890e+003	1.974588e+003	1.974588e+003	1.982890e+003
9.518000e+002	1.194700e+004	1.192118e+004	1.184735e+004	1.184735e+004	1.192118e+004		5.348000e+002	1.991167e+003	1.986863e+003	1.974558e+003	1.974558e+003	1.986863e+003
9.520000e+002	1.197100e+004	1.195434e+004	1.184713e+004	1.184712e+004	1.195435e+004		5.346000e+002	1.995167e+003	1.992389e+003	1.974522e+003	1.974521e+003	1.992391e+003
9.522000e+002	1.219900e+004	1.199897e+004	1.184652e+004	1.184649e+004	1.199901e+004		5.344000e+002	2.033167e+003	1.999829e+003	1.974420e+003	1.974415e+003	1.999834e+003
9.524000e+002	1.233500e+004	1.205792e+004	1.184570e+004	1.184560e+004	1.205802e+004		5.342000e+002	2.055833e+003	2.009654e+003	1.974284e+003	1.974267e+003	2.009671e+003
9.526000e+002	1.204300e+004	1.213448e+004	1.184556e+004	1.184525e+004	1.213479e+004		5.340000e+002	2.007167e+003	2.022413e+003	1.974259e+003	1.974208e+003	2.022465e+003
9.528000e+002	1.224600e+004	1.222972e+004	1.184541e+004	1.184452e+004	1.223062e+004		5.338000e+002	2.041000e+003	2.038287e+003	1.974235e+003	1.974087e+003	2.038436e+003
9.530000e+002	1.253700e+004	1.234436e+004	1.184570e+004	1.184327e+004	1.234679e+004		5.336000e+002	2.089500e+003	2.057394e+003	1.974283e+003	1.973878e+003	2.057798e+003
9.532000e+002	1.236900e+004	1.247832e+004	1.184858e+004	1.184232e+004	1.248459e+004		5.334000e+002	2.061500e+003	2.079720e+003	1.974764e+003	1.973719e+003	2.080765e+003
9.534000e+002	1.247100e+004	1.262781e+004	1.185648e+004	1.184118e+004	1.264311e+004		5.332000e+002	2.078500e+003	2.104635e+003	1.976080e+003	1.973530e+003	2.107185e+003
9.536000e+002	1.290000e+004	1.278601e+004	1.187464e+004	1.183926e+004	1.282139e+004		5.330000e+002	2.150000e+003	2.131002e+003	1.979106e+003	1.973210e+003	2.136898e+003
9.538000e+002	1.289000e+004	1.294451e+004	1.191474e+004	1.183736e+004	1.302188e+004		5.328000e+002	2.148333e+003	2.157418e+003	1.985789e+003	1.972894e+003	2.170314e+003
9.540000e+002	1.312900e+004	1.309111e+004	1.199513e+004	1.183502e+004	1.325122e+004		5.326000e+002	2.188167e+003	2.181852e+003	1.999188e+003	1.972504e+003	2.208536e+003
9.542000e+002	1.362400e+004	1.321236e+004	1.214497e+004	1.183179e+004	1.352554e+004		5.324000e+002	2.270667e+003	2.202060e+003	2.024161e+003	1.971964e+003	2.254256e+003
9.544000e+002	1.395100e+004	1.329619e+004	1.240641e+004	1.182795e+004	1.387465e+004		5.322000e+002	2.325167e+003	2.216032e+003	2.067735e+003	1.971325e+003	2.312442e+003
9.546000e+002	1.427300e+004	1.333312e+004	1.283048e+004	1.182353e+004	1.434008e+004		5.320000e+002	2.378833e+003	2.222187e+003	2.138413e+003	1.970588e+003	2.390013e+003
9.548000e+002	1.497000e+004	1.331775e+004	1.346511e+004	1.181783e+004	1.496502e+004		5.318000e+002	2.495000e+003	2.219625e+003	2.244184e+003	1.969639e+003	2.494170e+003
9.550000e+002	1.590800e+004	1.325069e+004	1.433257e+004	1.181043e+004	1.577282e+004		5.316000e+002	2.651333e+003	2.208448e+003	2.388761e+003	1.968405e+003	2.628804e+003
9.552000e+002	1.679400e+004	1.313859e+004	1.539608e+004	1.180141e+004	1.673325e+004		5.314000e+002	2.799000e+003	2.189764e+003	2.566014e+003	1.966902e+003	2.788876e+003
9.554000e+002	1.768800e+004	1.299252e+004	1.652847e+004	1.179076e+004	1.773023e+004		5.312000e+002	2.948000e+003	2.165420e+003	2.754745e+003	1.965127e+003	2.955038e+003
9.556000e+002	1.849000e+004	1.282553e+004	1.751223e+004	1.177864e+004	1.855912e+004		5.310000e+002	3.081667e+003	2.137588e+003	2.918704e+003	1.963106e+003	3.093186e+003
9.558000e+002	1.891400e+004	1.265101e+004	1.809752e+004	1.176573e+004	1.898280e+004		5.308000e+002	3.152333e+003	2.108501e+003	3.016253e+003	1.960954e+003	3.163800e+003
9.560000e+002	1.874600e+004	1.248091e+004	1.810966e+004	1.175310e+004	1.883748e+004		5.306000e+002	3.124333e+003	2.080152e+003	3.018277e+003	1.958849e+003	3.139580e+003
9.562000e+002	1.828000e+004	1.232388e+004	1.754139e+004	1.174128e+004	1.812399e+004		5.304000e+002	3.046667e+003	2.053980e+003	2.923565e+003	1.956881e+003	3.020665e+003
9.564000e+002	1.706300e+004	1.218633e+004	1.655869e+004	1.173165e+004	1.701337e+004		5.302000e+002	2.843833e+003	2.031055e+003	2.759782e+003	1.955276e+003	2.835562e+003
9.566000e+002	1.579000e+004	1.207069e+004	1.541062e+004	1.172431e+004	1.575700e+004		5.300000e+002	2.631667e+003	2.011781e+003	2.568437e+003	1.954052e+003	2.626166e+003
9.568000e+002	1.458100e+004	1.197698e+004	1.432068e+004	1.171914e+004	1.457852e+004		5.298000e+002	2.430167e+003	1.996163e+003	2.386781e+003	1.953190e+003	2.429754e+003
9.570000e+002	1.367300e+004	1.190331e+004	1.342364e+004	1.171560e+004	1.361134e+004		5.296000e+002	2.278833e+003	1.983885e+003	2.237274e+003	1.952601e+003	2.268557e+003
9.572000e+002	1.271100e+004	1.184753e+004	1.276285e+004	1.171380e+004	1.289658e+004		5.294000e+002	2.118500e+003	1.974588e+003	2.127142e+003	1.952301e+003	2.149429e+003
9.574000e+002	1.234500e+004	1.180595e+004	1.231822e+004	1.171266e+004	1.241151e+004		5.292000e+002	2.057500e+003	1.967658e+003	2.053037e+003	1.952110e+003	2.068585e+003
9.576000e+002	1.199400e+004	1.177590e+004	1.204159e+004	1.171215e+004	1.210534e+004		5.290000e+002	1.999000e+003	1.962650e+003	2.006932e+003	1.952025e+003	2.017556e+003
9.578000e+002	1.168300e+004	1.175478e+004	1.188134e+004	1.171210e+004	1.192402e+004		5.288000e+002	1.947167e+003	1.959131e+003	1.980223e+003	1.952017e+003	1.987337e+003
9.580000e+002	1.186900e+004	1.173983e+004	1.179401e+004	1.171182e+004	1.182202e+004		5.286000e+002	1.978167e+003	1.956638e+003	1.965668e+003	1.951969e+003	1.970337e+003
9.582000e+002	1.175700e+004	1.172976e+004	1.174950e+004	1.171173e+004	1.176753e+004		5.284000e+002	1.959500e+003	1.954960e+003	1.958251e+003	1.951956e+003	1.961255e+003
9.584000e+002	1.174900e+004	1.172303e+004	1.172809e+004	1.171167e+004	1.173946e+004		5.282000e+002	1.958167e+003	1.953839e+003	1.954682e+003	1.951944e+003	1.956577e+003
9.586000e+002	1.162900e+004	1.163603e+004	1.163576e+004	1.162900e+004	1.164279e+004		5.280000e+002	1.938167e+003	1.939338e+003	1.939294e+003	1.938167e+003	1.940465e+003
9.588000e+002	1.168400e+004	1.168826e+004	1.168663e+004	1.168400e+004	1.169090e+004		5.278000e+002	1.947333e+003	1.948044e+003	1.947772e+003	1.947333e+003	1.948483e+003
9.590000e+002	1.162600e+004	1.162853e+004	1.162697e+004	1.162600e+004	1.162951e+004		5.276000e+002	1.937667e+003	1.938089e+003	1.937829e+003	1.937667e+003	1.938251e+003
9.592000e+002	1.146500e+004	1.146648e+004	1.146534e+004	1.146500e+004	1.146682e+004		5.274000e+002	1.910833e+003	1.911080e+003	1.910890e+003	1.910833e+003	1.911136e+003
9.594000e+002	1.164700e+004	1.164784e+004	1.164711e+004	1.164700e+004	1.164796e+004		5.272000e+002	1.941167e+003	1.941307e+003	1.941185e+003	1.941167e+003	1.941326e+003
9.596000e+002	1.157900e+004	1.157947e+004	1.157903e+004	1.157900e+004	1.157951e+004		5.270000e+002	1.929833e+003	1.929912e+003	1.929839e+003	1.929833e+003	1.929918e+003
9.598000e+002	1.168000e+004	1.168026e+004	1.168001e+004	1.168000e+004	1.168027e+004		5.268000e+002	1.946667e+003	1.946710e+003	1.946668e+003	1.946667e+003	1.946712e+003
9.600000e+002	1.157100e+004	1.157114e+004	1.157100e+004	1.157100e+004	1.157114e+004		5.266000e+002	1.928500e+003	1.928523e+003	1.928500e+003	1.928500e+003	1.928524e+003
9.602000e+002	1.171200e+004	1.171207e+004	1.171200e+004	1.171200e+004	1.171208e+004		5.264000e+002	1.952000e+003	1.952012e+003	1.952000e+003	1.952000e+003	1.952013e+003
9.604000e+002	1.144700e+004	1.144704e+004	1.144700e+004	1.144700e+004	1.144704e+004		5.262000e+002	1.907833e+003	1.907840e+003	1.907833e+003	1.907833e+003	1.907840e+003
9.606000e+002	1.150300e+004	1.150302e+004	1.150300e+004	1.150300e+004	1.150302e+004		5.260000e+002	1.917167e+003	1.917170e+003	1.917167e+003	1.917167e+003	1.917170e+003
9.608000e+002	1.165600e+004	1.165601e+004	1.165600e+004	1.165600e+004	1.165601e+004		5.258000e+002	1.942667e+003	1.942668e+003	1.942667e+003	1.942667e+003	1.942668e+003
9.610000e+002	1.157500e+004	1.157500e+004	1.157500e+004	1.157500e+004	1.157500e+004		5.256000e+002	1.929167e+003	1.929167e+003	1.929167e+003	1.929167e+003	1.929167e+003
9.612000e+002	1.164600e+004	1.164600e+004	1.164600e+004	1.164600e+004	1.164600e+004		5.254000e+002	1.941000e+003	1.941000e+003	1.941000e+003	1.941000e+003	1.941000e+003
9.614000e+002	1.175800e+004	1.175800e+004	1.175800e+004	1.175800e+004	1.175800e+004		5.252000e+002	1.959667e+003	1.959667e+003	1.959667e+003	1.959667e+003	1.959667e+003
9.616000e+002	1.168800e+004	1.168800e+004	1.168800e+004	1.168800e+004	1.168800e+004		5.250000e+002	1.948000e+003	1.948000e+003	1.948000e+003	1.948000e+003	1.948000e+003
9.618000e+002	1.175000e+004	1.175000e+004	1.175000e+004	1.175000e+004	1.175000e+004		5.248000e+002	1.958333e+003	1.958333e+003	1.958333e+003	1.958333e+003	1.958333e+003
9.620000e+002	1.177000e+004	1.177000e+004	1.177000e+004	1.177000e+004	1.177000e+004		5.246000e+002	1.961667e+003	1.961667e+003	1.961667e+003	1.961667e+003	1.961667e+003
9.622000e+002	1.174100e+004	1.174100e+004	1.174100e+004	1.174100e+004	1.174100e+004		5.244000e+002	1.956833e+003	1.956833e+003	1.956833e+003	1.956833e+003	1.956833e+003
9.624000e+002	1.165900e+004	1.165900e+004	1.165900e+004	1.165900e+004	1.165900e+004		5.242000e+002	1.943167e+003	1.943167e+003	1.943167e+003	1.943167e+003	1.943167e+003
9.626000e+002	1.178200e+004	1.178200e+004	1.178200e+004	1.178200e+004	1.178200e+004		5.240000e+002	1.963667e+003	1.963667e+003	1.963667e+003	1.963667e+003	1.963667e+003
9.628000e+002	1.162100e+004	1.162100e+004	1.162100e+004	1.162100e+004	1.162100e+004		5.238000e+002	1.936833e+003	1.936833e+003	1.936833e+003	1.936833e+003	1.936833e+003
9.630000e+002	1.159700e+004	1.159700e+004	1.159700e+004	1.159700e+004	1.159700e+004		5.236000e+002	1.932833e+003	1.932833e+003	1.932833e+003	1.932833e+003	1.932833e+003
9.632000e+002	1.177800e+004	1.177800e+004	1.177800e+004	1.177800e+004	1.177800e+004		5.234000e+002	1.963000e+003	1.963000e+003	1.963000e+003	1.963000e+003	1.963000e+003
